Tables
1 Introduction to Vacuum Technology
- Table 1.1
- Composition of atmospheric air
- Table 1.2
- Pressure ranges in vacuum technology
- Table 1.3
- Conversion table for units of pressure
- Table 1.4
- Molar masses and mean thermal velocities of various gases
- Table 1.5
- Mean free path of selected gases at 273.15K
- Table 1.6
- Mean free path of a nitrogen molecule at 273.15K (0 °C)
- Table 1.7
- Overview of types of flow regimes
- Table 1.8
- Conversion table for units of throughput
2 Basic calculations
3 Mechanical components in vacuum
- Table 3.1
- Chemical composition (mass fraction) of stainless steels according to the European material designation pursuant to EN 10088 part 1
- Table 3.2
- Chemical composition (mass fraction) of stainless steels according to the material designation pursuant to AISI (American Iron and Steel Institute)
- Table 3.3
- Stainless steel properties
- Table 3.4
- Elastomer properties
- Table 3.5
- Comparison of sealing materials
- Table 3.6
- Mechanical characteristics and material of screws at room temperature
- Table 3.7
- Friction coefficient for stainless steel and zinc-plated steel screws
- Table 3.8
- Temperature dependence of the 0.2% yield point for stainless steel and steel screws with diameters ≤ M24
- Table 3.9
- Maximum tightening torque and maximum resulting preload force for stainless steel screws
- Table 3.10
- Maximum tightening torque and maximum resulting preload force for steel screws of strength class 8.8
4 Vacuum generation
- Table 4.1
- HenaLine performance data (all data refer to 50 Hz operation)
- Table 4.2
- UnoLine Plus performance data (all data refer to 50 Hz operation)
- Table 4.4
- DuoLine performance data
- Table 4.5
- Duo M series performance data
- Table 4.6
- Duo MC series performance data
- Table 4.7
- Pascal SD series performance data
- Table 4.8
- Pascal I series performance data
- Table 4.9
- Pascal C1 series performance data
- Table 4.10
- Pascal C2 series performance data
- Table 4.11
- Oil types for Backing pumps and Roots pumps
- Table 4.12
- Diaphragm pump performance data
- Table 4.13
- HeptaDry performance data
- Table 4.14
- Possible configurations of air cooled multi-stage Roots pumps
- Table 4.15
- Air cooled multi-stage Roots pump performance data
- Table 4.16
- Performance data for water cooled multi-stage Roots pumps for noncorrosive applications
- Table 4.17
- Performance data for P series water cooled multi-stage Roots pumps for corrosive applications
- Table 4.18
- Performance data for H series water cooled multi-stage Roots pumps for corrosive applications (harsh processes)
- Table 4.19
- OktaLine performance data
- Table 4.20
- OnTool Booster performance data
- Table 4.21
- Selected performance data for HiPace® for nitrogen
- Table 4.22
- Performance data for magnetic-bearing turbopumps for nitrogen
5 Vacuum measuring equipment
- Table 5.1
- Active and passive vacuum gauges
- Table 5.2
- Vacuum gauge selection guide
6 Mass spectrometers and residual gas analysis
- Table 6.1
- Filament materials and their use
- Table 6.2
- Detectors and their attributes
- Table 6.3
- Various gas inlet systems and their attributes
