4.9.3.2 Active magnetic-levitation turbopumps
Table 4.22 contains the characteristics of turbopumps with active 5-axis magnetically levitated bearings.
These pumps, too, are available as:
- HiPace® M with ISO-K or ISO-F flanges: HiPace turbo drag pumps with Holweck stages for generating high vacuum for standard applications
- HiPace® M with CF flanges: HiPace turbo drag pumps with Holweck stages for generating ultra-high vacuum
- ATP M: classic turbopumps without Holweck stages with a high compression ratio for light gases and a high particle tolerance
- ATH M and MT: Turbo drag pumps with Holweck stages, sealing gas system and heating for corrosive gas applications
Figure 4.30: ATH M magnetic-levitation turbopump
| Magnetic-levitation turbopump | ||||
|---|---|---|---|---|
| Model | Pumping speed | Compression ratio | Gas throughput* | Applications |
| HiPace 300 M | 255 l · s-1 | > 1 · 1011 | 28 hPa · l · s-1 | Analytics, coating, R&D |
| ATH 500 M / MT | 520 l · s-1 | > 2 · 107 | 67 hPa · l · s-1 | Semiconductors, coating, R&D |
| HiPace 700 M | 685 l · s-1 | > 1 · 1011 | 13 hPa · l · s-1 | Analytics, coating, R&D |
| HiPace 800 M | 790 l · s-1 | > 1 · 1011 | 13 hPa · l · s-1 | |
| ATH 1603 M | 1,370 l · s-1 | > 6 · 108 | 67 hPa · l · s-1 | Semiconductors, coating, R&D: Glass coating, solar cell manufacturing, surface finishing, CVD, PVD / sputtering, ion implantation, plasma physics |
| ATH 1600 MT | 1,370 l · s-1 | > 5 · 108 | 67 hPa · l · s-1 | |
| ATH 2303 M | 1,950 l · s-1 | > 1 · 108 | 67 hPa · l · s-1 | |
| ATH 2300 MT | 1,950 l · s-1 | > 1 · 108 | 67 hPa · l · s-1 | |
| ATP 2300 M | 1,850 l · s-1 | > 1 · 108 | 37 hPa · l · s-1 | |
| ATH 2800 M | 2,150 l · s-1 | > 1 · 108 | 84 hPa · l · s-1 | |
| ATH 2800 MT | 2,150 l · s-1 | > 1 · 108 | 84 hPa · l · s-1 | |
| ATH 3200 M | 2,700 l · s-1 | > 1 · 108 | 84 hPa · l · s-1 | |
| ATH 3200 MT | 2,700 l · s-1 | > 1 · 108 | 84 hPa · l · s-1 | |
*) The gas throughput depends on the drive.
Table 4.22: Performance data for magnetic-bearing turbopumps
for nitrogen
