4.6.6 Portfolio overview
4.6.6.1 Water cooled process pumps
The pumping speed and final pressure of the ACP 120 / ACP 120 G can be increased further increased by combining them with a Roots pumps. Optimized pump versions are available for larger volumes.
The technical data provided are given for a mains frequency of 50 Hz. Standard not more than 1 m3. Special versions of A 203 H and A 1803 H type pumps are suitable for volumes of up to 50 m3.
| Multi-stage Roots pumps for noncorrosive applications | |||
|---|---|---|---|
| Model | Pumping speed | Ultimate pressure with/without purge gas | Applications |
| ACP 120 | 95 m³ · h-1 | 3 · 10-2 hPa | Load locks and transfer chambers with a volume of up to 1 m3, noncorrosive gases, noble gases, regeneration of cryo pumps, backing pumps for turbopumps with noncorrosive gases |
| ACP 120 G | 95 m³ · h-1 | 9 · 10-2 with 35 slm purge gas | |
| A100 L | 100 m³ · h-1 | 6.6 · 10-3 hPa | |
| A100 L ES | 100 m³ · h-1 | 7 · 10-4 hPa | |
Table 4.16: Performance data for water cooled multi-stage Roots pumps for noncorrosive applications
| Multi-stage Roots pumps for corrosive applications | |||
|---|---|---|---|
| Model | Pumping speed | Ultimate pressure with/without purge gas | Applications |
| A 103 P | 120 m³ · h-1 | 6.5 · 10-3 hPa 2.6 · 10-2 hPa mit 20 slm Spülgas | Dry etching (oxide and poly) Ashing Stripping RTP Implantation |
| A 603 P | 480 m³ · h-1 | 5 · 10-4 hPa 2 · 10-3 hPa with 20 slm purge gas | |
| A 1003 P | 900 m³ · h-1 | 3 · 10-4 hPa 1 · 10-3 hPa mit 20 slm Spülgas | |
Table 4.17:Performance data for P series water cooled multi-stage Roots pumps for corrosive applications
| Multi-stage Roots pumps for corrosive applications (harsh processes) | |||
|---|---|---|---|
| Model | Pumping speed | Ultimate pressure with/without purge gas | Applications |
| A 203 H | 130 m³ · h-1 | 6 · 10-2 hPa 5 · 10-1 with 50 slm purge gas | Metal etching CVD (PECVD, SACVD, LPCVD) ALD Epitaxy Dry etching |
| A 803 H | 600 m³ · h-1 | 1 · 10-3 hPa 1 · 10-2 hPa with 50 slm purge gas | |
| A 1503 H | 1,100 m³ · h-1 | 2 · 10-3 hPa 9 · 10-3 hPa with 50 slm purge gas | |
| A 1803 H | 1,650 m³ · h-1 | 2 · 10-3 hPa 9 · 10-3 hPa with 50 slm purge gas | |
| AD 73 KH | 4,700 m³ · h-1 | 8 · 10-4 hPa 3 · 10-3 hPa with 50 slm purge gas | |
Table 4.18: Performance data for H series water cooled multi-stage Roots pumps for corrosive applications (harsh processes)
