4.9.3.1 Mechanical-bearing turbopumps
In the case of HiPace® turbopumps with oil-lubricated ball bearings on the fore-vacuum side and permanent-magnet bearings on the high vacuum side, a distinction is made between the following turbopump series:
- HiPace® with ISO-K flanges: HiPace turbo drag pumps with Holweck stages for generating high vacuum for standard applications
- HiPace® with CF flanges: HiPace turbo drag pumps with Holweck stages for generating ultra-high vacuum
- HiPace® Plus: HiPace turbo drag pumps with Holweck stages with a reduced magnetic stray field and an extra low vibration level
- HiPace® P: classic turbopumps for applications with a dust content
Figure 4.29: Standard HiPace turbopumps
Table 4.21 contains the characteristics of standard pumps with hybrid bearings. All other series are modifications of these standard models and essentially have the same characteristics.
| HiPace turbomolecular pumps | ||||
|---|---|---|---|---|
| Model | Pumping speed | Compression Ratio | Gas throughput* | Applications |
| HiPace 10 | 11.5 l · s-1 | 3.0 · 107 | 0.37 hPa · l · s-1 | Analytical applications, leak detectors, gas flow control systems, incandescent and fluorescent lamp manufacturing |
| SplitFlow 50 | 53 l · s-1 | >1.0 · 108 | 1.8 hPa · l · s-1 | |
| HiPace 60 P | 64 l · s-1 | >1.0 · 106 | 9.2 hPa · l · s-1 | |
| HiPace 80 | 67 l · s-1 | >1.0 · 1011 | 1.3 hPa · l · s-1 | Analytical applications, research & development, coating, semiconductor manufacturing |
| HiPace 300 | 260 l · s-1 | >1.0 · 1011 | 5.0 hPa · l · s-1 | |
| HiPace 400 | 355 l · s-1 | >1.0 · 1011 | 6.5 hPa · l · s-1 | |
| HiPace 700 | 685 l · s-1 | >1.0 · 1011 | 6.5 hPa · l · s-1 | |
| HiPace 800 | 790 l · s-1 | >1.0 · 1011 | 6.5 hPa · l · s-1 | |
| HiPace 1200 | 1,250 l · s-1 | >1.0 · 108 | 20 hPa · l · s-1 | Glass coating, solar cell manufacturing, surface finishing, CVD, PVD / sputtering, ion implantation, plasma physics, space simulation |
| HiPace 1500 | 1,450 l · s-1 | >1.0 · 108 | 20 hPa · l · s-1 | |
| HiPace 1800 | 1,450 l · s-1 | >1.0 · 108 | 20 hPa · l · s-1 | |
| HiPace 2300 | 1,900 l · s-1 | >1.0 · 108 | 20 hPa · l · s-1 | |
*) The gas throughput depends on the drive.
Table
4.21: Selected performance data for HiPace® for nitrogen
The base pressures of standard pumps with ISO-K flanges are: $p_b$ < 1 · 10-7 hPa. After baking out, pumps with CF flanges attain base pressures of $p_b$ < 5 · 10-10 hPa.
