4.2.3.2 Two-stage rotary vane vacuum pumps
Two-stage rotary vane pumps are suitable for applications in the low and medium vacuum ranges down to a pressure of 10-3 hPa. An integrated gas ballast feed allows condensable vapors to be pumped down.
DuoLine
DuoLine rotary vane vacuum pumps are powered by AC or DC motors, depending upon the size of the pump. In addition to the standard models, the following designs are also available: Magnetically coupled pumps (Duo M series) and corrosive gas pumps, both with and without magnetic coupling (Duo MC series).
Duo M series
M series pumps are equipped with a magnetic coupling with a hermetic sealing. This wear-free sealing concept hermetically seals the pumps, making them clean and environmentally friendly. The magnetic coupling minimizes maintenance resulting in significant savings.
| DuoLine | |||
|---|---|---|---|
| Model | Pumping speed | Ultimate pressure | Applications |
| Duo 1,6 | 1.25 m³ · h-1 | 3 · 10-3 hPa | Turbopump pumping stations, analysis, research and development, coating |
| Duo 3 | 2.5 m³ · h-1 | 3 · 10-3 hPa | |
| Duo 6 | 5 m³ · h-1 | 3 · 10-3 hPa | |
| Duo 11 | 9 m³ · h-1 | 3 · 10-3 hPa | |
| Duo 35 | 32 m³ · h-1 | 3 · 10-3 hPa | |
| Duo 65 | 62 m³ · h-1 | 2 · 10-3 hPa | |
| Duo 125 | 115 m³ · h-1 | 2 · 10-3 hPa | |
| Duo 255 | 250 m³ · h-1 | 3 · 10-3 hPa | |
Table 4.4: DuoLine performance data
| Duo M series | |||
|---|---|---|---|
| Model | Pumping speed | Ultimate pressure | Applications |
| Duo 1,6 M | 1.25 m³ · h-1 | 3 · 10-3 hPa | Turbopump pumping stations, analysis, research & development, coating, non-explosive toxic gases |
| Duo 3 M | 2.5 m³ · h-1 | 3 · 10-3 hPa | |
| Duo 6 M | 5 m³ · h-1 | 3 · 10-3 hPa | |
| Duo 11 M | 9 m³ · h-1 | 3 · 10-3 hPa | |
| Duo 35 M | 32 m³ · h-1 | 3 · 10-3 hPa | |
| Duo 65 M | 62 m³ · h-1 | 2 · 10-3 hPa | |
| Duo 125 M | 115 m³ · h-1 | 2 . 10-3 hPa | |
| Duo 255 M | 250 m³ · h-1 | 3 · 10-3 hPa | |
Table 4.5: Duo M series performance data
Duo MC series
The MC series pumps are suitable for corrosive gas applications. In contrast to standard pumps, they have a special gas ballast valve, through which inert gas can be admitted into the pump. In addition, the pumps are equipped with special vanes that are especially resistant to chemicals. All corrosive gas pumps in the MC series are ready for operation with chemical-resistant F4 or F5 (perfluoropolyether) operating fluids. The Duo MC pumps are especially suitable for pumping toxic gases because the hermetically sealed magnetic coupling prevents gas from escaping to the outside.
Pascal
Rotary vane vacuum pumps in the Pascal series in the pumping speed class of between 5 and 21 m3 · h-1 are built with either AC or DC motors. The inlet and outlet flange can be either vertical or horizontal for ideal integration or to enable accessories to be attached. Besides the standard range, the I series with forced lubrication and two different corrosive gas series are also available.
SD series
The SD series of rotary vane vacuum pumps is designed for noncorrosive gases. The natural lubrication (pumping speed class up to 21 m3 · h-1) minimizes the amount of oil discharge from the exhaust. The low pump temperature reduces the oil backflow at the final pressure to a minimum during long-term operation.
As in all other pumps in the pumping speed class up to 21 m³ · h-1 the pump shaft seal is accessible without dismantling the pump block and field maintenance is easy as a result.
I series
Pumps in the I series are equipped with forced lubrication. This enhances their water vapor tolerance in comparison with the SD series. Forced lubrication allows I series pumps to achieve a very low noise level and low vibration.
C1 series
Forced lubrication pumps in the C1 series are particularly suitable for corrosive gas applications due to their
FPM seals and chromium oxide coated shafts and the use of special materials for the housing, vanes, shaft sleeves and sightglasses. The two largest models in this series also have integrated oil filters and oil casing flushing device.
The C1 series is supplied with mineral oil.
| Duo MC series | |||
|---|---|---|---|
| Model | Pumping speed | Ultimate pressure | Applications |
| Duo 20 MC | 20 m³ · h-1 | 5 · 10-3 hPa | Corrosive gas applications, chemical labs, toxic non-explosive gases |
| Duo 35 MC | 32 m³ · h-1 | 3 · 10-3 hPa | |
| Duo 65 MC | 62 m³ · h-1 | 3 · 10-3 hPa | |
Table 4.6: Duo MC series performance data
| Pascal SD series | |||||
|---|---|---|---|---|---|
| Model | Pumping speed 50 Hz | Pumping speed 60 Hz | Ultimate pressure | Ultimate pressure with Gas ballast | Applications |
| 2005 SD | 5 m³/h | 6 m³/h | 5 · 10-4 hPa | 1 · 10-2 hPa | Industrial applications, analysis, research and development, leak detection |
| 2010 SD | 9 m³/h | 10.5 m³/h | 5 · 10-4 hPa | 1 · 10-2 hPa | |
| 2015 SD | 14 m³/h | 16.5 m³/h | 5 · 10-4 hPa | 1 · 10-2 hPa | |
| 2021 SD | 18 m³/h | 22 m³/h | 5 · 10-4 hPa | 1 · 10-2 hPa | |
Table 4.7: Pascal SD series performance data
| Pascal I series | |||||
|---|---|---|---|---|---|
| Model | Pumping speed 50 Hz | Pumping speed 60 Hz | Ultimate pressure | Ultimate pressure with Gas ballast | Applications |
| 2005 I | 5 m³/h | 6 m³/h | 5 · 10-4 hPa | 1 · 10-2 hPa | Analysis, research and development, drying, distillation |
| 2010 I | 9 m³/h | 10.5 m³/h | 5 · 10-4 hPa | 1 · 10-2 hPa | |
| 2015 I | 14 m³/h | 16.5 m³/h | 5 · 10-4 hPa | 1 · 10-2 hPa | |
| 2021 I | 18 m³/h | 22 m³/h | 5 · 10-4 hPa | 1 · 10-2 hPa | |
Table 4.8: Pascal I series performance data
C2 series
Pumps in the C2 series are also equipped with forced lubrication. The anticorrosive gas equipment of these pumps with bearing lubrication, a neutral gas flushing facility for degassing the operating fluid and the use of special vane materials is superior to the C1 series. The two largest models in this series are also fitted with connections for oil pressure sensors and oil temperature sensors. Armed with this anticorrosive gas equipment, Pascal C2 pumps are particularly suitable for use in etching and coating processes in semiconductor fabrication.
The C2 series is supplied with perfluorinated operating fluids.
| Pascal C1 series | |||
|---|---|---|---|
| Model | Pumping speed | Ultimate pressure | Applications |
| 2005 C1 | 5 m³ · h-1 | 2 · 10-3 hPa | Corrosive gas application, chemical laboratories, load lock and transfer chamber chemical applications, sterilization |
| 2010 C1 | 10 m³ · h-1 | 2 · 10-3 hPa | |
| 2015 C1 | 15 m³ · h-1 | 2 · 10-3 hPa | |
| 2021 C1 | 21 m³ · h-1 | 2 · 10-3 hPa | |
| 2033 C1 | 30 m³ · h-1 | 3 · 10-3 hPa | |
| 2063 C1 | 60 m³ · h-1 | 3 · 10-3 hPa | |
Table 4.9: Pascal C1 series performance data
| Pascal C2 series | |||
|---|---|---|---|
| Model | Pumping speed | Ultimate pressure | Applications |
| 2010 C2 | 10 m³ · h-1 | 2 · 10-3 hPa | Coating, semiconductors (CVD, plasma etching, implantation), pumping pure oxygen |
| 2015 C2 | 15 m³ · h-1 | 2 · 10-3 hPa | |
| 2021 C2 | 21 m³ · h-1 | 2 · 10-3 hPa | |
| 2033 C2 | 30 m³ · h-1 | 3 · 10-3 hPa | |
| 2063 C2 | 60 m³ · h-1 | 3 · 10-3 hPa | |
Table 4.10: Pascal C2 series performance data
| Oil types | Description | Erreichbarer Enddruck | Achievable ultimate pressure | HenaLine, UnoLine Plus, DuoLine, OktaLine | Pascal |
|---|---|---|---|---|---|
| P3 | Mineral oil for standard applications Extremely low vapor pressure | < 1 · 10-3 hPa | Air, noncorrosive gases, noble gases | ||
| A120 | General purpose mineral oil without additives, all-purpose oil for 50 Hz | < 3 · 10-3 hPa | Air, noncorrosive gases, noble gases; high viscosity | ||
| D1 | Diester oil for standard and special applications | < 5 · 10-2 hPa | Air, noncorrosive gases, noble gases, oxygen, mildly aggressive and organic solvents | ||
| A155 | Synthetic oil on organic ester base | < 3 · 10-3 hPa | Hydrocarbon vapors, NH3, R134a, refrigerants; oxidation-resistant, resistant to polymerization (low slight deposit) | ||
| F4 | Perfluoropolyether for special applications | < 1 · 10-3 hPa | Oxygen, ozone, halogens, organic and inorganic solvents, HCl, BF3, HF | for pumps < 20 m³ h-1 | |
| F5 | for pumps > 20 m³ h-1 | ||||
| A113 | Perfluoropolyether synthetic oil | < 5 · 10-3 hPa | Oxygen, ozone, halogens, organic and inorganic solvents, high resistance to corrosive gases, suitable for plasma etching | ||
| A119 | General purpose mineral oil without additives, all-purpose oil for 60 Hz | < 3 · 10-3 hPa | Air, noncorrosive gases, noble gases; low viscosity, therefore good start-up properties at low temperatures | ||
| A121 | Double-distilled mineral synthetic oil with antioxidant additive | < 3 · 10-3 hPa | Cyclic pumping at atmospheric pressure, for high temperatures and pressures, resistant to acidic and organic vapors; not suitable for plasma etching | ||
| A102 | Mineral oil with anti-emulsifier | < 3 · 10-2 hPa | Oil and water separation (anti-emulsion), water vapor drying and pumping, freeze-drying | ||
| A111 | Additivated hydro-carbon anti-emulsion mineral oil | < 1 · 10-2 hPa | Gas circulation and gas return; oxidation-sensitive (not suitable for frequent cycles at atmospheric pressure) | ||
| A200 | Temperature-stable, mineral synthetic oil | < 2 · 10-3 hPa | Resistant to corrosive gases and ionizing plasma; low slight backflow | ||
| A300 | Double-distilled white mineral oil without additives | < 5 · 10-3 hPa | High resistance to corrosive gases and ionizing plasma; resistant to halogens and Lewis acids; low slight backflow |
Table 4.11: Oil types for Backing pumps and Roots pumps
